Contact information:
Facility Manager: Øystein Prytz
Location: Gaustadalleen 21, Forskningsparken
0316 OSLO
Norway
Instruments:
- Dual-beam focused ion beam, JEOL JIB-4500
Description of services:
- TEM lamella production
- Three dimensional “Slice and View”
- Microscale two-point electrical characterisation
About FIB
The lab in Forskningsparken houses a JEOL JIB-4500, which is a dual-beam focused ion beam (FIB) that allows sample preparation and investigation. The SEM gun is a LaB6 emitter. The sample stage takes samples up to 5 cm x 5cm sizes. The system is equipped with a Kleindiek micro manipulator needle to allow sample lift-out, as well as a Kleindiek two-point electrical characterization system. The system is often used in conjunction with TEM-lamella fabrication. The FIB is equipped with a gas-injection system that can deposit carbon and tungsten in large and small areas. The FIB can also induce stress-relaxation in a material and perform three-dimensional “slice and view”.