The Scale-Up Room

The Scale-up Room is a laboratory with equipment dedicated to doing ALD on larger substrates and wafers. The TSF500 reactor is the biggest ALD reactor with a reactor chamber that can fit large wafers. This lab is also used for developing new ALD equipment and for the FT-IR instrument.

 

For more information, please contact Ola Nilsen

Published May 14, 2024 10:58 AM - Last modified May 14, 2024 10:58 AM
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